JPH0196646U - - Google Patents
Info
- Publication number
- JPH0196646U JPH0196646U JP19419087U JP19419087U JPH0196646U JP H0196646 U JPH0196646 U JP H0196646U JP 19419087 U JP19419087 U JP 19419087U JP 19419087 U JP19419087 U JP 19419087U JP H0196646 U JPH0196646 U JP H0196646U
- Authority
- JP
- Japan
- Prior art keywords
- abnormal phenomenon
- ion implanter
- data file
- error code
- storing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 3
- 230000002159 abnormal effect Effects 0.000 claims 11
- 238000003745 diagnosis Methods 0.000 claims 2
- 238000005468 ion implantation Methods 0.000 claims 2
- 238000011084 recovery Methods 0.000 claims 2
- 230000005856 abnormality Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19419087U JPH0196646U (en]) | 1987-12-21 | 1987-12-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19419087U JPH0196646U (en]) | 1987-12-21 | 1987-12-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0196646U true JPH0196646U (en]) | 1989-06-27 |
Family
ID=31484931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19419087U Pending JPH0196646U (en]) | 1987-12-21 | 1987-12-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0196646U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61206149A (ja) * | 1985-03-08 | 1986-09-12 | Hitachi Ltd | イオン打込装置 |
-
1987
- 1987-12-21 JP JP19419087U patent/JPH0196646U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61206149A (ja) * | 1985-03-08 | 1986-09-12 | Hitachi Ltd | イオン打込装置 |
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